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Accurate Determination of Dislocation Density in GaN Using Chemical Mechanical Polishing
Accurate Determination of Dislocation Density in GaN Using Chemical Mechanical Polishing
2013
Purushottam Kumar
Suhas Rao
Jin-Hyung Lee
Deepika Singh
Rajiv K. Singh
Keywords:
Chemical-mechanical planarization
Dislocation
Chemistry
Inorganic chemistry
Chemical engineering
Analytical chemistry
Crystallography
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