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Invited) Innovative Slurry Approaches for Next Generation of Metal and Dielectric CMP
Invited) Innovative Slurry Approaches for Next Generation of Metal and Dielectric CMP
2010
Rajiv K. Singh
Deepika Singh
Abhudaya Mishra
Purushottam Kumar
Jaeseok Lee
Keywords:
Nanotechnology
Dielectric
Manufacturing engineering
Slurry
Materials science
Metal
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