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Molecular Transfer Printing of Block Copolymer Patterns over Large Areas with Conformal Layers
Molecular Transfer Printing of Block Copolymer Patterns over Large Areas with Conformal Layers
2015
Takejiro Inoue
Dustin W. Janes
Jiaxing Ren
Hyo Seon Suh
Xuanxuan Chen
Christopher J. Ellison
Paul F. Nealey
Keywords:
Chemical vapor deposition
Conformal map
Transfer printing
Copolymer
Polymer chemistry
Materials science
directed self assembly
Nanotechnology
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