Characterization of the kinetic inductance fraction of NbTiN MKIDs

Microwave Kinetic Inductance Detectors (MKIDs), with high sensitivity and relatively simple frequency multiplexing, are emerging as a kind of large-array detectors in the terahertz (THz) band. An MKID, like a superconducting resonator, is composed of a planar capacitor and inductor that are made from superconducting films. The energy gap of the superconducting film for the planar inductor (at least part of it) is lower than the energy of photons to be detected. The kinetic inductance of the superconducting film irradiated by the photons is increased, shifting the resonance frequency toward a lower frequency. The frequency shift is proportional to the kinetic inductance fraction, i.e., the ratio of the kinetic inductance to the total inductance of the planar superconducting inductor. In this paper, we thoroughly investigate the kinetic inductance fraction for lumped-element and antenna-coupled MKIDs, which are both made from NbTiN. The detailed simulation, calculation, and measurement results will be presented.