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Hydride Vapor Phase Epitaxy of Thick GaN Layers on ScAlMgO 4 Substrates and their Self-Separation Process
Hydride Vapor Phase Epitaxy of Thick GaN Layers on ScAlMgO 4 Substrates and their Self-Separation Process
2017
Kazuki Ohnishi
Masaya Kanoh
Tomoyuki Tanikawa
Shigeyuki Kuboya
Takashi Mukai
Takashi Matsuoka
Keywords:
Hydride
Epitaxy
Inorganic chemistry
Materials science
nitride semiconductors
Optoelectronics
Self-separation
vapor phase
Correction
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