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DLTS investigation of impurity or defect agglomerates in silicon on the example of oxygen precipitates
DLTS investigation of impurity or defect agglomerates in silicon on the example of oxygen precipitates
2017
I. V. Antonova
V.P. Popov
S. S. Shaimeev
Keywords:
Radiochemistry
Oxygen
Agglomerate
Impurity
Precipitation (chemistry)
Materials science
Silicon
oxygen precipitates
Chemical engineering
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