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High rate and low-temperature sputter-deposition of Ni-Zn ferrite thin-films
High rate and low-temperature sputter-deposition of Ni-Zn ferrite thin-films
2004
Tomoharu Ogita
Setsuo Yamamoto
Gen Isida
Hiroki Kurisu
Mitsuru Matsuura
Yoshihiro Shimosato
Shigenobu Okada
Keywords:
Thin film
Sputter deposition
Ferrite (magnet)
Metallurgy
Materials science
high rate
ferrite thin films
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