Fabrication of TiO2 Arrays Using Solvent-Assisted Soft Lithography

We present a simple solvent-assisted soft lithography method to fabricate titania (TiO2) patterns. The dimensions of the TiO2 features can be controlled by adjusting the concentration of the solution, the solvent evaporation duration, and temperature. This method may provide a facile route for fabricating large area patterns of metal oxide.