Preparation of B-C system materials by CVD

The B-C coating was prepared by CVD from BCl3-C3H6-H2 precursor mixtures on the carbon fiber.The effect of the depositing temperature on the coating's character was analyzed.The microstructure of the deposit was analyzed by SEM.The element content and the type of the chemical structure of the deposited coating were studied by X-ray photoelectron spectroscopy.The inducements of the microstructure,component and various types of the chemical structure were discussed with the consideration of the chemical reaction processes.SEM results show that with the depositing temperature rising from 900℃ to 1100℃,the growth rate increases and the cross section microstructure turns from amorphous into laminated structure.XPS results show that with the increasing of temperature,the content of boron increases.The boron accommodates five different chemical structures in the BCx coatings.The content of boron within these different chemical structures is also influenced by the depositing temperature.