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Producing Silicon Carbide Micro and Nanostructures by Plasma-Free Metal-Assisted Chemical Etching
Producing Silicon Carbide Micro and Nanostructures by Plasma-Free Metal-Assisted Chemical Etching
2021
Julian A. Michaels
Lukas Janavicius
Xihang Wu
Clarence Chan
Hsieh Chih Huang
Shunya Namiki
Munho Kim
Dane J. Sievers
Xiuling Li
Keywords:
Chemical engineering
Isotropic etching
Metal
Plasma
Materials science
Raman spectroscopy
Nanostructure
Porosity
Silicon carbide
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