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Sensitivity enhanced FTIR investigation of defects introduced by RTA pre-treatment in Czochralski silicon wafers
Sensitivity enhanced FTIR investigation of defects introduced by RTA pre-treatment in Czochralski silicon wafers
2017
Dawid Kot
Gudrun Kissinger
Andreas Sattler
Keywords:
Analytical chemistry
Fourier transform infrared spectroscopy
Wafer
Chemistry
Chemical engineering
pre treatment
Correction
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