Radiation resistance of double-type double-sided 3D pixel sensors

The proposed high-luminosity upgrade of the Large Hadron Collider is expected to increase the instantaneous luminosity at the experiments' interaction points by a factor of ten. The vertex detector will be the subsystem most affected by the luminosity increase, raising substantially their occupancy and radiation-induced damage. To preserve the vertex physics performance under these new conditions, current pixel technologies have to be improved. Hybrid pixel sensors with double-sided double-type vertical electrodes (3D sensors) are becoming a mature technology for the detector layers closest to the interaction point due to their intrinsic radiation hardness. In addition, the double-sided implementation of the 3D pixel technology provides some additional technical advantages with respect to the singlesided implementation. For this study, 3D pixel sensors manufactured at the Centro Nacional de Microelectronica of Barcelona (IMB-CNM) have been bonded to the PSI46 readout chip currently used by the Compact Muon Solenoid vertex detector. Detector performance before and after irradiation up to fluences of 5 � 10 15 neq=cm2 is presented.