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High-Performance Metal Hard Mask Process Using Fiber-Textured TiN Film for Cu Interconnects
High-Performance Metal Hard Mask Process Using Fiber-Textured TiN Film for Cu Interconnects
2016
Naoki Torazawa
Takeshi Harada
Tatsuya Kabe
Daisuke Inagaki
Yasunori Morinaga
Dai Motojima
Susumu Matsumoto
Keywords:
Inorganic chemistry
Fiber
Tin
Chemistry
Metal
hard mask
Analytical chemistry
Nanotechnology
Correction
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