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Optimization of AlN films grown by atomic layer deposition
Optimization of AlN films grown by atomic layer deposition
2021
M. Beshkova
B S Blagoev
V Mehandzhiev
R. Yakimova
I. Avramova
P. Terziyska
D. Kovacheva
V. Strijkova
Keywords:
Atomic layer deposition
Materials science
Chemical engineering
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