Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films

We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt.% molybdenum. The optimum electrical and optical properties were obtained with the 2% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) single crystal substrates. Films also exhibit greater than 90% transparency in the visible range. Compared to commercial indium tin oxide (ITO) films, these PLD-grown IMO films have similar conductivity but since they have substantially higher mobility they have a correspondingly lower carrier concentration. The lower carrier concentration should extend the infrared window of the transparency for films of the same conductivity. This may lead to improved performance in a number of applications requiring improved performance TCOs.