A novel robust diffraction-based metrology concept for measurement and monitoring of critical layers in memory devices
2010
Current image based overlay metrology accuracy will not be suitable for the critical layers of near future memory
production. At current nodes, measurement reproducibility of 0.6nm or better is required. The number of sampling points
is also expected to increase due to the need for higher order process corrections on the exposure tool. To maintain or
improve total measurement cost, these requirements should be met without negatively impacting throughput.
In this paper we will study a novel, diffraction-based system especially designed to meet these challenging requirements
for next generation memory devices. In addition to overlay metrology, the system is capable of measuring CD and side
wall angle (SWA) within the same measurement cycle. The system can also be used to monitor exposure tool overlay
and focus stability. In this paper we intend to examine the metrics used to evaluate the overlay metrology performance
critical for a DRAM production environment. We also intend to spend much of the paper taking a deeper look at how we
can combine the overlay and CD metrology functionalities to examine the asymmetric profile of target gratings.
One of the critical applications for diffraction based overlay metrology is in understanding the asymmetric properties of
target gratings across a wafer. Reconstructing asymmetric profiles quickly, effectively and with a suitable degree of
sensitivity, will allow measurement accuracy to be further enhanced and will open the door to numerous applications
within the memory fab environment including process monitoring and improvement. In this paper, we intend to
investigate techniques for detecting asymmetric structures and also for the more complex issue of reconstructing the
shape of these structures.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
3
Citations
NaN
KQI