Resolution correction in EELS

Abstract Correction for inelastically scattered electrons is important in determining intensities in elastic peak electron spectroscopy (EPES), e.g. for obtaining information on inelastic mean free paths in the material, relevant parameters in quantitative applications of electron spectroscopy. The spectral shape of electron energy loss spectra depends more strongly on the spectrometer function in the elastic peak region, than in the continuous energy part. Therefore the resolution correction of the EELS spectra results in a considerable change of the spectral shape. The importance and the role of this correction is demonstrated in the case of REELS of Ni sample comparing the shapes of EELS spectra measured at different energy resolutions using different type spectrometers : (1) home-made HSA (ESA 31). Debrecen ; (2) home-made HSA (Clermont Ferrand) ; (3) CMA MAC2 by CAMECA-RIBER and a HSA (Lyon) ; (4) CMA OPC105 type by RIBER (Budapest).