TMAH (tetramethylammonium hydroxide) recovery device and method

The invention relates to a TMAH (tetramethylammonium hydroxide) recovery device and method, in particular to a recovery device of a TMAH solution applied to electronic manufacturing industries such as thin film transistor liquid crystal display, semiconductors and the like. The TMAH recovery device comprises a liquid waste tank, an ion exchange resin bed, a precipitation reaction kettle and the like. According to the device and the method, other impurities such as photoresist resin and the like in a developing liquid can be removed, and electronic-grade TMAH is obtained; further, the device and the method have the advantages of simple structure, capability of continuous production and recycling use, cost saving, pollution reduction and facilitation of popularization and use.