Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation

Arnaud Valour,Maria A. Usuga Higuita,N. Crespo-Monteiro,Stéphanie Reynaud,Marion Hochedel,Damien Jamon,Christophe Donnet,Yves Jourlin

Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation

2020

Arnaud Valour
Maria A. Usuga Higuita
N. Crespo-Monteiro
Stéphanie Reynaud
Marion Hochedel
Damien Jamon
Christophe Donnet
Yves Jourlin

The miniaturization of optical components to control and manipulate light amplitude, phase, and polarization requires micro- to nanostructured metasurfaces that provide resonant light–matter intera...

Keywords:

thermal nitridation
sol gel coating
Tin
Polarization (waves)
Miniaturization
Thin film
Optoelectronics
Materials science

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