Process and apparatus for the manufacture of silane

1998 
According to the invention, silane is produced in a continuous method by dismutating trichlorosilane in a catalyst bed at a temperature ranging from -20 DEG to 50 DEG C.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []