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Nanometrology and microsystems for Life Science
Nanometrology and microsystems for Life Science
2002
Tijani Gharbi
Christian Pieralli
A. Jalocha
Bruno Wacogne
Vincent Armbruster
Vincent Bonnans
D. Marsaut
Christophe Roux
Philippe Humbert
Keywords:
Nanometrology
Nanotechnology
Microsystem
Materials science
Engineering
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