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Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
2015
B.J. Hutchinson
V. S. Teodorescu
R. Negrea
Brendan Sheehan
Patrick B. Carolan
Shane O'Brien
M. Modreanu
Martyn E. Pemble
Ian M. Povey
Keywords:
Capacitor
Atomic layer deposition
Hafnium
Silicate
Substrate (chemistry)
Metal-insulator-metal
Chemistry
Inorganic chemistry
Mineralogy
Chemical engineering
metal insulator metal capacitor
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