Investigation of InGaN-based red/green micro-light-emitting diodes.

We investigated the performance of InGaN-based red/green micro-light-emitting diodes (µLEDs) ranging from 98×98µm2 to 17×17µm2. The average forward voltage at 10A/cm2 was independent of the dimension of µLEDs. Red µLEDs exhibited a larger blueshift of the peak wavelength (∼35nm) and broader full-width at half maximum (≥50nm) at 2−50A/cm2 compared to green µLEDs. We demonstrated that 47×47µm2 red µLEDs had an on-wafer external quantum efficiency of 0.36% at the peak wavelength of 626 nm, close to the red primary color defined in the recommendation 2020 standard.