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Application of CVD SiO2 Single Layer Films to Inter-Poly Dielectrics of Flash Memories
Application of CVD SiO2 Single Layer Films to Inter-Poly Dielectrics of Flash Memories
1995
Takashi Kobayashi
Masahiro Ushiyama
Naoki Miyamoto
Jiro Yugami
Hitoshi Kume
Katsutaka Kimura
Keywords:
Dielectric
Nanotechnology
Materials science
single layer
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