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Mechanically Robust Spin-On Organosilicates Glasses for Nanoporous Applications | NIST
Mechanically Robust Spin-On Organosilicates Glasses for Nanoporous Applications | NIST
2007
Hyun Wook Ro
Kookeon Char
Eun-Chae Jeon
Hyoungsu Kim
Dongil Kwon
Hae-Jeong Lee
Jung-Jun Lee
Hee-Woo Rhee
Christopher L. Soles
Do Y. Yoon
Keywords:
Nanotechnology
Modulus
NIST
Thin film
Materials science
Porosity
Nanoporous
Low-k dielectric
Nanoindentation
Spin-½
Composite material
Correction
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