Processing of Nanoscale Gaps for Boron-doped Nanocrystalline Diamond Based MEMS☆

Abstract In this work we present a technological process flow enabling fabrication of transversal nanofeatures in nanocrystalline diamond based MEMS. Growth of thin diamond films on nanostructured templates, projection exposure lithography and bi-layer electron beam lithography are the key technologies used. Electrode gaps in the order of 100 nm have been successfully accomplished with suspended microplates with dimensions of 1×1 μm 2 .