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Low-k SiBN(Silicon Boron Nitride) Film Synthesized by a Plasma Assisted Atomic Layer Deposition
Low-k SiBN(Silicon Boron Nitride) Film Synthesized by a Plasma Assisted Atomic Layer Deposition
2006
Sang Ryol Yang
Jin-Gyun Kim
Jin-Tae Noh
Hong-suk Kim
Sung-Hae Lee
Jae Young Ahn
Ki-Hyun Hwang
Yu-gyun Shin
U-I. Chung
Joo-Tae Moon
Dong-kak Lee
In-Sun Yi
Ran-Ju Jung
Sang-Bum Kang
Keywords:
Plasma
Boron nitride
Nitride
Atomic layer deposition
Materials science
Inorganic chemistry
Silicon
Chemical engineering
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