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Fabrication and characterization of a fine electron biprism on a Si-on-insulator MEMS chip
Fabrication and characterization of a fine electron biprism on a Si-on-insulator MEMS chip
2016
Martial Duchamp
Olivier Girard
Rolf Speen
Rafal E. Dunin-Borkowski
Florian Winkler
Keywords:
Nanotechnology
Chip
Fabrication
Electron
Microelectromechanical systems
Insulator (electricity)
Materials science
Electronic engineering
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