Silicon Photonic MEMS Phase Shifter Using Gradient Electric Force Actuation

Venkatesh Deenadayalan,Matthew van Niekerk,Michael L. Fanto,Stefan F. Preble

Silicon Photonic MEMS Phase Shifter Using Gradient Electric Force Actuation

2020

Venkatesh Deenadayalan
Matthew van Niekerk
Michael L. Fanto
Stefan F. Preble

A foundry-compatible MEMs phase shifter for silicon photonic circuits that works with a low electro-static actuation voltage of 12V to produce an overall phase shift of 1.53π is presented in this paper.

Keywords:

Microelectromechanical systems
Optoelectronics
Electric field
Phase shift module
Silicon photonics
Silicon
Voltage
Phase (waves)
Electronic circuit
Materials science

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