Effective receiving area of the antenna-coupled terahertz detector

In order to accurately characterize the radio frequency (RF) responsivity of the antenna-coupled detector in the terahertz (THz) band, we introduce an iterative deconvolution algorithm to extract the effective receiving area. We use this method to characterize an antenna-coupled Nb 5 N 6 microbolometer as an example. The effective receiving area is approximately 0.7  mm 2 , which is 7.4 times larger than the physical area of the detector. The RF responsivity of the Nb 5 N 6 microbolometer is 480  V/W at 0.28 THz, including the effect of the antenna coupling and the substrate interference. This work offers an effective way to characterize antenna-coupled THz detectors and to analyze the element-to-element spacing along two orthogonal directions in THz focal plane array chips.