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Sub-30 nm CMOSFET with Ni(Pt)-FUSI/SiON Gate Stack
Sub-30 nm CMOSFET with Ni(Pt)-FUSI/SiON Gate Stack
2009
H. Fukutome
Kazuya Okubo
S. Akiyama
Naoki Idani
Hiroyuki Ohta
Kazuo Kawamura
Y. Momiyama
S. Satoh
Keywords:
Nanotechnology
Electronic engineering
Materials science
gate stack
Optoelectronics
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