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High Removal Rate Cobalt Slurry with Glutathione on Chemical Mechanical Polishing in Alkaline Slurry
High Removal Rate Cobalt Slurry with Glutathione on Chemical Mechanical Polishing in Alkaline Slurry
2020
Aoxue Xu
Daohuan Feng
Weilei Wang
Weili Liu
Zhitang Song
Keywords:
Chemical-mechanical planarization
Materials science
Glutathione
Slurry
Cobalt
Chemical engineering
Correction
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