Cantilever arrays with integrated actuation and sensing for parallel SPM

Abstract Concept, design and realization of cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning are described. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control. The characteristics of the fabricated arrays as well as parallel surface scan results are shown.