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21114 Fabrication of Si nano-holes and Cu fill using supercritical CO_2
21114 Fabrication of Si nano-holes and Cu fill using supercritical CO_2
2009
Kakeru Tamai
Masahiro Matsubara
Chia-Lung Lee
Michio Matsubara
Eiichi Kondoh
Keywords:
Supercritical fluid
Nano-
Materials science
Composite material
Chemical engineering
Fabrication
Correction
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