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Helicon wave plasma enhanced sputtering and application to synthesis of carbon nitride films
Helicon wave plasma enhanced sputtering and application to synthesis of carbon nitride films
1995
Jinqiu Zhang
Naoaki Seto
Masayoshi Kamai
Yuichi Setsuhara
Shoji Miyake
J. Zhang
se watari naoki
kamai seizen
fusi hara yuuiti
miyake masasi
Keywords:
Nitrogen
Carbon nitride
Materials science
Plasma
Argon
Fourier transform infrared spectroscopy
X-ray photoelectron spectroscopy
Analytical chemistry
Helicon
Sputtering
Correction
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