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Roughness Reduction Processing of 4H-SiC 3D structure formed by Dry Etching Process
Roughness Reduction Processing of 4H-SiC 3D structure formed by Dry Etching Process
2021
Tadashi Sato
Riku Takeuchi
Takuma Shima
Vuong Van Cuong
Shin-Ichiro Kuroki
Keywords:
Surface finish
Reduction (complexity)
Composite material
Dry etching
process
Materials science
Correction
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