Current development status of MOCVD and its process for UVLED application towards post COVID-19

Through development effort of MOCVD for LED application, we attempt to find new application towards post COVID-19. UVLED has feature of small size and high speed response which is different from mercury lamps while output power and/or wall plug efficiency is not matured. Development status of MOCVD and its process for UVLED process is presented. Ex-situ high temperature furnace for AlN template exhibit excellent crystalline quality. Ex-situ dry cleaning tool is utilized for cleaning MOCVD components without Cl contamination.