Two-cavity MEMS capacitive power scavenger

We have designed, modeled, fabricated and tested novel MEMS variable capacitors with two air cavities (two capacitors) for electrostatic power harvesting utilizing mechanical vibration in environment. The device is unique in the use of an innovative two-cavity design and electroplated nickel as the main structural material, which allows using both up and down directions to generate energy. The prototype of two-cavity MEMS variable capacitors have been successfully fabricated using surface micromachining. The initial testing for investigating electrical dynamic behaviors and power generation from the fabricated devices was implemented.