The microstructure, mechanical and electrical properties of Niobium pentoxide-doped Titanium oxide ceramic targets

Nb2O5 doped TiO2 (NTO) ceramic targets were prepared by sintering in Ar at l350 °C for 2 hours. The morphologies structures, densification behavior, mechanical and electrical properties of the sintered ceramic targets with different doping concentration were investigated. The results show that the Nb2O5 content of increase from 0 wt% to 10 wt% not only enhance the densification but promote the grain growth. The morphologies, compositions, microstructure, and chemical states were characterized by SEM and XRD. The relative density, grain size and resistivity of 7.5 wt% content sintered at 1350 °C in Ar were 94.5%, 13.76 μm, and 7.8×10−2 Ωcm, respectively.