Facile synthesis and improved photoluminescence of periodic SiC nanorod arrays by SiO2 templates-assisted magnetron sputtering method

Silicon carbide (SiC) nanorod arrays with closely-packed periodic architecture are successfully fabricated by magnetron sputtering using SiO2 colloidal monolayer as template. The growth mechanism and photoluminescence (PL) characteristics of SiC nanorod arrays have been investigated. It is found that the arrays periodicity can easily be controlled by the different sizes of SiO2 spheres. The arrays prepared from smaller SiO2 spheres are prone to be densely integrated and top aggregation, while more defects and shorter periodicity are found for arrays from bigger spheres. Improved PL performance of SiC nanorod arrays is revealed with enhancement ratios proportion to the diameters of SiC nanorods, which is caused by their special light manipulating properties and greater surface areas. The enhanced PL of SiC nanorod arrays is highly promising for use in designing highly efficient optical devices.