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Effectiveness of UV-Ozone Treatment and Alneal Process for Si Surface Passivation with Sol-Gel Spray-Coated SiO2 Film
Effectiveness of UV-Ozone Treatment and Alneal Process for Si Surface Passivation with Sol-Gel Spray-Coated SiO2 Film
2021
Jayshree Bhajipale
Anil Kottantharayil
Keywords:
Passivation
Chemical engineering
uv ozone
process
Sol-gel
Materials science
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