Transmission Line of Si02 Thin-film Measurements for Accurate Characteristics

candidates in the semiconductor industry, and it has been paid a great attention by various parties. At millimeter-wa ve (mm-wave) frequencies, S-parameters can comprehensively and intuitively indicate the performance of the devices and systems. In this study, a series of wafer-probe measurements and electromagnetic simulations (EMs) are performed with the same design layouts but different lengths of the transmission lines up to 6 GHz. However, due to the probe doesn't directly use for contacting transmission line, extra test fixtures such as probing pads are designed, but these fixtures can produce noise for test results. To achieve the "real" S-parameters of the transmission lines, "L-2L" de-embedding technique based on the cascade approach and an equivalent-circu it approach is used to remove these parasitics of the instrument itself. It is a process of mathematically subtracting networks from the measured results by the algorithm between S­ parameters and ABCD-parameters transmission matrix, and the probe pads are modeled a lumped series impedance and a limped