FIB mask repair technology for electron projection lithography

We have studied stencil mask repair technology with focused ion beam and developed an advanced mask repair tool for electron projection lithography. There were some challenges in the stencil mask repair, which were mainly due to its 3-dimensional structure with aspect ratio more than 10. In order to solve them, we developed some key technologies with focused ion beam (FIB). The transmitted FIB detection technique is a reliable imaging method for a 3-dimensional stencil mask. This technique makes it easy to observe deep patterns of the stencil mask and to detect the process endpoint. High-aspect processing can be achieved using gas-assisted etching (GAE) for a stencil mask. GAE enables us to repair mask patterns with aspect ratio more than 50 and very steep sidewall angle within 90±1°precisely. Edge placement accuracy of the developed tool is about 14nm by manual operation. This tool is capable to achieve less than 10nm by advanced software. It was found that FIB technology had capability to satisfy required specifications for EPL mask repair.