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Hiroshi Matsumura
Hiroshi Matsumura
Seiko Instruments
Focused ion beam
Materials science
Lithography
Electronic engineering
Optics
3
Papers
7
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2024
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FIB mask repair technology for electron projection lithography
2004
Yoh Yamamoto
Masakatsu Hasuda
Hiroyuki Suzuki
Makoto Sato
Osamu Takaoka
Hiroshi Matsumura
Noboru Matsumoto
Kouji Iwasaki
Ryoji Hagiwara
Katsumi Suzuki
Yutaka Ikku
Kazuo Aita
Takashi Kaito
Tatsuya Adachi
Anto Yasaka
Jiro Yamamoto
Teruo Iwasaki
Masaki Yamabe
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Citations (6)
Recent progress in repair accuracy of the focused ion-beam mask repair system
1996
Kazuo Aita
Anto Yasaka
Tadashi Kitamura
Hiroshi Matsumura
Yasushi Satoh
Hiroshi Nakamura
Junji Fujikawa
Katsuhide Tsuchiya
Shigeru Noguchi
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New technique for repairing opaque defects
1995
Kazuo Aita
Yoshihiro Koyama
Hiroshi Matsumura
Takashi Kaito
Yasushi Satoh
Katsuhide Tsuchiya
Shigeru Noguchi
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