A novel approach for scalable sensor arrays using cantilever field-effect transistors

Based on a novel approach of reading-out cantilever sensors with an exponential response of the measurement signal on adsorption of e.g. molecules, we study cantilever array sensors that enable the detection and discrimination of various different adsorbates. Different cantilever geometries and different ratios of functionalized and unfunctionalized areas on the cantilevers are used together with a pairwise comparison of the measurement signal, i.e. a shift of resonance frequency of oscillating cantilevers. As a result, a discrimination of different adsorbates becomes possible with a limited number of functionalizations.