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Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction
2021
Hiroaki Honma
Yukiya Tohyama
Hiroyuki Mitsuya
Gen Hashiguchi
Hiroyuki Fujita
Hiroshi Toshiyoshi
Keywords:
Optoelectronics
Reduction (complexity)
Parasitic capacitance
Power (physics)
Electric potential energy
Microelectromechanical systems
Materials science
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