FRICTION DRIVE SYSTEM FOR NANO-CMM

The Coordinate Measuring Machines (CMMs) are widely used for three-dimensional measurements of workpieces. For solving the limits and the drawbacks of the traditional CMM, we have started developing Nano-CMM that measures dimensions and orientations of three -dimensional parts in nanometer resolution. In this article, we introduce a friction drive system as a driving system for Nano-CMM. Using the friction drive system, straightness of the stages and thermal drifts of Nano-CMM are evaluated.