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Improvement of Variability and Reliability in Low-k/Cu Interconnects by Selectivity Control in Dry-Etching Process
Improvement of Variability and Reliability in Low-k/Cu Interconnects by Selectivity Control in Dry-Etching Process
2010
Ippei Kume
M. Ueki
Naoya Inoue
J. Kawahara
Nobuyuki Ikarashi
N. Furutake
S. Saitoh
Yoshihiro Hayashi
Keywords:
Dry etching
Selectivity
Materials science
Inorganic chemistry
Chemical engineering
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