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Spatially-Resolved Dopant Characterization with a Scanning Microwave Microscope | NIST
Spatially-Resolved Dopant Characterization with a Scanning Microwave Microscope | NIST
2013
Thomas M. Wallis
Atif Imtiaz
Alexandra E. Curtin
Pavel Kabos
Matthew D. Brubaker
Norman A. Sanford
Kristine A. Bertness
Keywords:
NIST
Nanoelectronics
Dopant
Microscope
Microwave
Materials science
Analytical chemistry
Nanotechnology
spatially resolved
Correction
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