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A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes
A Tri-axis MEMS Accelerometer with a Gold Electroplated Single-proof-mass and Segmented Electrodes
2017
Shota Otobe
Daisuke Yamane
Toshifumi Konishi
Teruaki Safu
Hiroyuki Ito
Shiro Dosho
Noboru Ishihara
Katsuyuki Machida
Kazuya Masu
Keywords:
Electroplating
Microelectromechanical systems
Accelerometer
Proof mass
Materials science
Electrode
Optoelectronics
Correction
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